Free-Flex® Pivots have been used for many years within the semiconductor industry to facilitate production of wafers and integrated circuits created by lithography. As technology advances and new manufacturing methods become available, equipment must also be adapted for increased speed and accuracy.
There are many steps throughout wafer production from creation, processing, masking and inspection. These processes use many different technologies that require fine motion and high frequency oscillation of sensors, mirrors and beams.
Free-Flex® Pivots are a compact and readily available device uniquely suited for these types of tasks, offering the following benefits, among a variety of others:
- Infinite life capable with maintenance-free operation
- Ideal for clean room and vacuum environments
- Can be oscillated at a high speed
- Naturally compliant flexures absorb small vibrations®
